Oxford Instruments

Oxford Instruments offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, HBLED, PV, MEMS & microfluidics, high quality optical coatings and many other applications in micro- and nanotechnology.

These solutions are based on core technologies in:

  • Plasma Etch & Deposition
  • Atomic Layer Deposition (ALD)
  • Ion Beam Etch & Deposition
  • Deep Silicon Etch Systems
  • Magnetron sputtering
Products range from compact stand-alone systems for R&D, through to batch tools and up to cassette-to-cassette and clustered platforms for production processing.