Prestige Lecture by Dr. Ir. Jelm Franse of ASML, The Netherlands, June 2016
Precision Mechanics and Mechatronics in ASML Lithography Equipment – Key Drivers for the Continuation of Moore’s Law for Semiconductor Devices
The EPSRC Centre in Ultra Precision had great pleasure in welcoming Dr. Ir. Jelm Franse, Senior Director of Precision Mechanics at ASML, The Netherlands to Cranfield University on Tuesday 28 June 2016 for the Centre’s annual prestige lecture.
The evening was a great success with participants attending from industry, academia, local schools and colleges. The lecture was led by Prof Paul Shore FREng of the National Physical Laboratory and Prof Pat McKeown OBE, FREng provided the audience with an introduction to the guest speaker.
An overview is presented of the semiconductor manufacturing process and the role of lithography in driving the semiconductor roadmap.
Today’s litho machines have to provide (mixed machine) overlay in the order of a few nanometres and output has to be hundreds of wafers per hour. This means that any physical effects that can be quantified are modelled and taken into account in feedforward compensation schemes; sensors, actuators and electronics have to be designed for ultimate speed and accuracy (repeatability).
The main precision mechanical and mechatronic characteristics of the ASML litho machines since 1984 up to today and into the future are presented. Main challenges of both systems operating in atmospheric conditions and in vacuum are discussed.
Dr. Ir. Jelm Franse obtained his MSc in Metals Science from Delft University in 1984. He started his career at Philips Research in the field of Tribology and Precision Engineering, working on precision manufacturing of optical components.
From 1987 to 1989 he worked at Lawrence Livermore National Laboratory as part of a knowledge exchange program between Philips and LLNL.
In 1992 after finishing a PhD thesis on precision grinding at the Technical University of Eindhoven, as a result of his research in this area for Philips, he transferred to Philips Center for Manufacturing Technology. He started there as group-leader within the mechatronics department, and subsequently became manager of various departments and eventually VP of Philips CFT Sector Systems.
In 2004 he transferred to Philips Lighting as Innovation Manager for Solid State Lighting. In 2006 he became Executive VP of Singulus Mastering, responsible for all company activities except Sales and After Sales Service. In 2009 he joined Etel/Heidenhain as Advanced Development Manager. From 2010 he has been working at ASML as Senior Director Mechanics, responsible for all mechanical precision modules in the ASML machines.